4

Thin SOI structures for sensing and integrated circuit applications

Year:
1993
Language:
english
File:
PDF, 1.36 MB
english, 1993
8

Characteristics of tantalum nitride thin film strain gauges for harsh environments

Year:
2007
Language:
english
File:
PDF, 693 KB
english, 2007
25

RTD characteristics for micro-thermal sensors

Year:
2008
Language:
english
File:
PDF, 1.10 MB
english, 2008
29

Ohmic contacts to polycrystalline 3C–SiC films for extreme environment microdevices

Year:
2008
Language:
english
File:
PDF, 765 KB
english, 2008